Filters For Ultra-Fine Cleaning Of Gases
Metal ceramic ceramic filters are not collapsible, they are designed for ultrafine filtration of air, nitrogen, hydrogen, oxygen, argon, helium and other gases chemically inert to the materials of the housing and the filter element.
Filter class U 16.
Recommended for use in the production of integrated circuits for the absolute removal of gases particles of at least 0,01 mcm.
Filter class U 16.
Recommended for use in the production of integrated circuits for the absolute removal of gases from particles of at least 0.01 μm in size.
EFFICIENCY OF CLEANING
| Name of the filter | Recommended flow rate | Cleaning efficiency |
| MKF-10 | up to 3 nm³/h (50 nl/min) | At least 99.99999% for particles of at least 0.01 μm in size |
| MKF-40 | from up to 3 nm³/h (50 nl/min) to 9 nm³/h (150 nl/min) | |
| MKF-140 | from up to 9 nm³/h (150 nl/min) to 20 nm³/h (330 nl/min) | |
| MKF-280 | from up to 20 nm³/h (330 nl/min) to 40 nm³/h (660 nl/min) |
- Processing of internal surfaces of the case:
Electrochemical polishing. - Preparation for work:
Preparation for operation and testing in clean rooms of Class 100. - Packing:
Two polyethylene bags filled with purified air argon or nitrogen.
- Operating conditions:
The ambient temperature is from +5 to +35 0С.
Spatial orientation is arbitrary. - Recommended replacement frequency:
Two years with the preliminary filtration of the gas from particles larger than 2 μm.
Filter MKF-10:
Filter MKF-40:
Filter MKF-140:
Filter MKF-280:
SPECIFICATIONS
| Options | MKF-10 | MKF-40 | MKF-140 | MKF-280 |
| Parameters of the filtered gas: - pressure at the inlet of the filter - temperature - relative humidity | not more than 1.0 MPa (10 kgf / cm²) from +5 to +150 ° С not more than 80% |
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| The pressure drop across the filter at a gas flow rate | 0,25 m³/h | 1,0 m³/h | 5,0 m³/h | 10,0 m³/h |
| Strength to the effect of pressure drop in the forward and reverse direction | up to 0.6 MPa (6 kgf / cm²) | |||
| Materials used: - filter element - housing | -nickel -stainless steel |
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| Local leakage of the housing | Not more than 1 * 10 ^ -3 l * mkm of mercury. s / s at an internal pressure of helium (1.00 ± 0.05) MPa [(10 ± 0.5) kgf / cm²] and temperature (25 ± 10) ° С | |||
| Filter surface area | 10 cm² | 40 cm² | 140 cm² | 280 cm² |
MKF-10 SIZE
| Notation | D, мм | S, мм | n |
| еК2.966.754 | М14ˣ1,5 | 17 | - |
| -01 | Thread 9/16 " | 18 threads per 1 " |
Connecting dimensions:
MKF-40 SIZE
| Notation | D, мм | D1, мм | S, мм | D2, мм | n |
| еК2.966.731 | Ø 6 | Ø 9,4 | 17 | М 14ˣ1,5 | - |
| -01 | Ø 6 | Ø 9,4 | 17 | 9/16‟ | 18 threads per 1 " |
| -02 | Ø 9 | Ø 14 | 19 | М 18ˣ1,5 | - |
| -03 | Ø 10 | Ø 17,3 | 24 | М 22ˣ1,5 | 14 threads per 1 " |
| -04 | Ø 10 | Ø 17,3 | 24 | 7/8‟ | - |
| еК2.966.733 | Ø 6 | Ø 8 | 17 | М 16ˣ1,5 | - |
| -01 | Ø 8 | Ø 11 | 22 | М 20ˣ1,5 | - |
Connecting dimensions:
MKF-140 SIZE
| Notation | D, mm | D1, mm | S, mm | D2, mm | n | L, mm | L1, мм |
| еК2.966.732 | Ø 6 | Ø 9,4 | 17 | М 14ˣ1,5 | - | 136 | 220 |
| -01 | Ø 9 | Ø 14 | 19 | М 18ˣ1,5 | - | 136 | 220 |
| -02 | Ø 10 | Ø 17,3 | 24 | М 22ˣ1,5 | - | 136 | 220 |
| -05 | Ø 6 | Ø 9,4 | 17 | 9/16‟ | 18 threads per 1 " | 136 | 220 |
| -06 | Ø 10 | Ø 17,3 | 24 | 7/8‟ | 14 threads per 1 " | 136 | 220 |
| еК2.966.730 | Ø 21 | Ø 27,8 | 36 | М 33ˣ2 | - | 136 | 220 |
| -01 | Ø 32 | Ø 38,8 | 46 | М 45ˣ3 | - | 136 | 220 |
| еК2.966.734 | Ø 6 | Ø 8 | 17 | М 16ˣ1,5 | - | 136 | 220 |
| -01 | Ø 8 | Ø 11 | 22 | М 20ˣ1,5 | - | 136 | 220 |
Connecting dimensions:
MKF-280 SIZE
| Notation | D, мм | D1, мм | S, мм | D2, мм | n | L, мм | L1, мм |
| еК2.966.732 -03 | Ø 9 | Ø 14 | 19 | М 18ˣ1,5 | - | 216 | 300 |
| -04 | Ø 10 | Ø 17,3 | 24 | М 22ˣ1,5 | - | 216 | 300 |
| -07 | Ø 6 | Ø 9,4 | 17 | 9/16‟ | 18 threads per 1 " | 216 | 300 |
| -08 | Ø 10 | Ø 17,3 | 24 | 7/8‟ | 14 threads per 1 " | 216 | 300 |
| еК2.966.730 -02 | Ø 21 | Ø 27,8 | 36 | М 33ˣ2 | - | 216 | 300 |
| -03 | Ø 32 | Ø 38,8 | 46 | М 45ˣ3 | - | 216 | 300 |
| еК2.966.734 -02 | Ø 6 | Ø 8 | 17 | М 16ˣ1,5 | - | 216 | 300 |
| -03 | Ø 8 | Ø 11 | 22 | М 20ˣ1,5 | - | 216 | 300 |
Connecting dimensions:
