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Фильтры для сверхтонкой очистки газов (МКФ)
Filters For Ultra-Fine Cleaning Of Gases

Metal ceramic ceramic filters are not collapsible, they are designed for ultrafine filtration of air, nitrogen, hydrogen, oxygen, argon, helium and other gases chemically inert to the materials of the housing and the filter element.

Filter class U 16.

Recommended for use in the production of integrated circuits for the absolute removal of gases particles of at least 0,01 mcm.

Filter class U 16.

Recommended for use in the production of integrated circuits for the absolute removal of gases from particles of at least 0.01 μm in size.

EFFICIENCY OF CLEANING
Name of the filterRecommended flow rateCleaning efficiency
MKF-10up to 3 nm³/h (50 nl/min)At least 99.99999% for particles of at least 0.01 μm in size
MKF-40from up to 3 nm³/h (50 nl/min) to 9 nm³/h (150 nl/min)
MKF-140from up to 9 nm³/h (150 nl/min) to 20 nm³/h (330 nl/min)
MKF-280from up to 20 nm³/h (330 nl/min) to 40 nm³/h (660 nl/min)
  • Processing of internal surfaces of the case:
    Electrochemical polishing.
  • Preparation for work:
    Preparation for operation and testing in clean rooms of Class 100.
  • Packing:
    Two polyethylene bags filled with purified air argon or nitrogen.
  • Operating conditions:
    The ambient temperature is from +5 to +35 0С.
    Spatial orientation is arbitrary.
  • Recommended replacement frequency:
    Two years with the preliminary filtration of the gas from particles larger than 2 μm.
Filter MKF-10:
Фильтр МКФ-10
Filter MKF-40:
Фильтр МКФ-40
Filter MKF-140:
Фильтр МКФ-140
Filter MKF-280:
Фильтр МКФ-280
SPECIFICATIONS
OptionsMKF-10MKF-40MKF-140MKF-280
Parameters of the filtered gas:
 - pressure at the inlet of the filter
 - temperature
 - relative humidity
not more than 1.0 MPa (10 kgf / cm²)
from +5 to +150 ° С not more than 80%
The pressure drop across the filter at a gas flow rate0,25 m³/h1,0 m³/h5,0 m³/h10,0 m³/h
Strength to the effect of pressure drop in the forward and reverse directionup to 0.6 MPa (6 kgf / cm²)
Materials used:
 - filter element
 - housing
-nickel
-stainless steel
Local leakage of the housingNot more than 1 * 10 ^ -3 l * mkm of mercury. s / s at an internal pressure of helium (1.00 ± 0.05) MPa [(10 ± 0.5) kgf / cm²] and temperature (25 ± 10) ° С
Filter surface area10 cm²40 cm²140 cm²280 cm²
MKF-10 SIZE
NotationD, ммS, ммn
еК2.966.754М14ˣ1,517-
-01Thread 9/16 "18 threads per 1 "
Connecting dimensions:
MKF-40 SIZE
NotationD, ммD1, ммS, ммD2, ммn
еК2.966.731Ø 6Ø 9,417М 14ˣ1,5-
-01Ø 6Ø 9,4179/16‟18 threads per 1 "
-02Ø 9Ø 1419М 18ˣ1,5-
-03Ø 10Ø 17,324М 22ˣ1,514 threads per 1 "
-04Ø 10Ø 17,3247/8‟-
еК2.966.733Ø 6Ø 817М 16ˣ1,5-
-01Ø 8Ø 1122М 20ˣ1,5-
Connecting dimensions:
MKF-140 SIZE
NotationD, mmD1, mmS, mmD2, mmnL, mmL1, мм
еК2.966.732Ø 6Ø 9,417М 14ˣ1,5-136220
-01Ø 9Ø 1419М 18ˣ1,5-136220
-02Ø 10Ø 17,324М 22ˣ1,5-136220
-05Ø 6Ø 9,4179/16‟18 threads per 1 "136220
-06Ø 10Ø 17,3247/8‟14 threads per 1 "136220
еК2.966.730Ø 21Ø 27,836М 33ˣ2-136220
-01Ø 32Ø 38,846М 45ˣ3-136220
еК2.966.734Ø 6Ø 817М 16ˣ1,5-136220
-01Ø 8Ø 1122М 20ˣ1,5-136220
Connecting dimensions:
MKF-280 SIZE
NotationD, ммD1, ммS, ммD2, ммnL, ммL1, мм
еК2.966.732 -03Ø 9Ø 1419М 18ˣ1,5-216300
-04Ø 10Ø 17,324М 22ˣ1,5-216300
-07Ø 6Ø 9,4179/16‟18 threads per 1 "216300
-08Ø 10Ø 17,3247/8‟14 threads per 1 "216300
еК2.966.730 -02Ø 21Ø 27,836М 33ˣ2-216300
-03Ø 32Ø 38,846М 45ˣ3-216300
еК2.966.734 -02Ø 6Ø 817М 16ˣ1,5-216300
-03Ø 8Ø 1122М 20ˣ1,5-216300
Connecting dimensions:
""
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